Mesa 6.0 with stacked pad capability and improved pad mechanical model theory is now available. Using Mesa 6.0, you can perform CMP and deposition simulations for stacked layers (e.g., metal layers 1, 2, 3, and so on). You can also model hard pads or stack pads.
Follow three steps to get your free demonstration copy:
Step 1: Download installation package
Step 2: Install the bug-fix patch
Download these two exe files and copy them over the exe files in the Mesa installation directory (probably C:\Program Files\m6.):
Step 3: Send an e-mail to:
Include in your e-mail the following information:
In return, an e-mail will be sent back to you containing what you need to get started.
Thank you for your interest!